AL 18 Tabletop Unit
AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.
For activating plastic and metal surfaces or for creating high-purity surfaces.
Application examples:Â Pretreatment of metal and plastic parts prior to bonding, gluing, painting or printing, ultra-fine cleaning of glasses, metals, ceramics or other vacuum-compatible substrates.
Description
Our smallest AL-system
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Dimensions:
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        L: 530mm W: 600mm H: 550mm
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Weight:
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            80 KG
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Volume:
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           18 Liter
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Process chamber:
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   aluminium, L: 250mm W: 290mm H:250mm
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Microwave output:
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  2,45 GHz / 50 – 1200 Watt
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Inclusive:
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          1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
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Substrate holder
(optional):
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    aluminium, custom design possible
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Vacuum connection:
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DN 25 ISO-KF
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Venting:
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           electromagnetic solenoid valve
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Pump system:
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      15-35 m³/h
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Chamber door:
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     hinged-type with viewing port
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