AL 36 Tabletop Unit
AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.
For activating plastic and metal surfaces or for creating high-purity surfaces.
Application examples:Â Pretreatment of metal and plastic parts prior to bonding, gluing, painting or printing, ultra-fine cleaning of glasses, metals, ceramics or other vacuum-compatible substrates.
Description
Slightly bigger version of the AL18 with more options and load capacity
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Dimensions:
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                L: 680mm W: 630mm H: 650mm
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Weight:
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                    110 KG
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Volume:
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                   36 Liter
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Process chamber:
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           aluminium, L: 350mm W: 320mm H: 320mm
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Microwave output:
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          2,45 GHz / 50 – 1200 Watt
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Inclusive:
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                  1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
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Substrate holder (optional):
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 aluminium, custom design possible
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Vacuum connection:
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        DN 25 ISO-KF
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Venting:
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                   electromagnetic solenoid valve
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Pump system:
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              15-65 m³/h
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Chamber door:
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              hinged-type with viewing port
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