Q 240S

The Q stands for quartz glass chambers.

Plasma equipment of series Q are mostly used in semi-conductor technology and in the area of analysis and medical technology.

Application examples: Cleaning and incineration of organic samples and varnishes in micro mechanics as well as for silicium wafers in semi-conductor industry.

Description

A system with the diameter of our Q240S but with reduced chamber depth for the sake of saving space

Dimensions:
                             L: 620mm W: 550mm H: 500mm
Weight:
                                      75 KG
Volume:
                                     9 Liter
Process chamber:
                    Quarzglas, 240mm Ø , B: 244mm
Microwave output:
                  2,45 GHz / 50 – 1200 Watt
Inclusive:
                                   1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional):
  aluminium, custom design possible
Vacuum connection:
                DN 40 ISO-KF
Venting:
                                      electromagnetic solenoid valve
Pump system:
                             up to 25m³/h
Chamber door:
                           you can choose between hinged-type with viewing port and drawer door with attached support rods
Wafer size:
                                  up to 150mm, at a number of 25 wafers
Reviews (0)

Reviews

There are no reviews yet.

Be the first to review “Q 240S”

Your email address will not be published. Required fields are marked *