- Bonder & Flip Chip
- Atmospheric Plasma Cleaner
- Vacuum Plasma Cleaner
- Spin Rinse Dryer
- Dispensing & Micro/Nano Printing System
- Lithography Process Systems
- Rapid Thermal Processing & Annealing
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- Materials
AL 18 (19 inch rack)
AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.
For activating plastic and metal surfaces or for creating high-purity surfaces.
Application examples:Â Pretreatment of metal and plastic parts prior to bonding, gluing, painting or printing, ultra-fine cleaning of glasses, metals, ceramics or other vacuum-compatible substrates.
Description
A 19 inch rack with two frequencies for polymerization
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Dimensions:
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              L: 530mm W: 600mm H: 1800mm
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Weight:
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                   95 KG
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Volume:
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                  18 Liter
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Process chamber:
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          aluminium, L: 250mm W: 290mm H:250mm
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Microwave output:
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         2,45 GHz / 50 – 1200 Watt
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Inclusive:
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                  1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
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Substrate holder (optional):
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 aluminium, custom design possible
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Vacuum connection:
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        DN 25 ISO-KF
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Venting:
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                   electromagnetic solenoid valve
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Pump system:
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              15-35 m³/h
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Chamber door:
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             hinged-type with viewing port
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