AL 18 (19 inch rack)

AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.

For activating plastic and metal surfaces or for creating high-purity surfaces.

Application examples: Pretreatment of metal and plastic parts prior to bonding, gluing, painting or printing, ultra-fine cleaning of glasses, metals, ceramics or other vacuum-compatible substrates.

Description

A 19 inch rack with two frequencies for polymerization

Dimensions:
                            L: 530mm W: 600mm H: 1800mm
Weight:
                                     95 KG
Volume:
                                    18 Liter
Process chamber:
                    aluminium, L: 250mm W: 290mm H:250mm
Microwave output:
                  2,45 GHz / 50 – 1200 Watt
Inclusive:
                                   1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional):
  aluminium, custom design possible
Vacuum connection:
                DN 25 ISO-KF
Venting:
                                     electromagnetic solenoid valve
Pump system:
                           15-35 m³/h
Chamber door:
                          hinged-type with viewing port