AL 18 Tabletop Unit

AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.

For activating plastic and metal surfaces or for creating high-purity surfaces.

Application examples: Pretreatment of metal and plastic parts prior to bonding, gluing, painting or printing, ultra-fine cleaning of glasses, metals, ceramics or other vacuum-compatible substrates.

Description

Our smallest AL-system

Dimensions:
               L: 530mm W: 600mm H: 550mm
Weight:
                       80 KG
Volume:
                      18 Liter
Process chamber:
     aluminium, L: 250mm W: 290mm H:250mm
Microwave output:
   2,45 GHz / 50 – 1200 Watt
Inclusive:
                    1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder
(optional):
       aluminium, custom design possible
Vacuum connection:
DN 25 ISO-KF
Venting:
                      electromagnetic solenoid valve
Pump system:
            15-35 m³/h
Chamber door:
          hinged-type with viewing port