Spin Rinse Dryer
M Tek SRDs are available in Double Stack, Single Stack, and Benchtop Models and in three different model of S, F and ST for wafer size up to 12″.
Description
M Tek SRDs are available in Double Stack, Single Stack, and Benchtop Models
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S Model
Key Features
Brushless Motor
Labyrinth Seal
Rotor - Quick Disconnect
Controller - 102 or 101
Plastic (Aero Style)
F Model
Key Features
Brushless Motor
Ferrofluidic Seal
Rotor - 4 Bolt
Controller - 101
Plastic (Block Style)
ST Model
Key Features
Brushless Motor
Ferrofluidic Seal
Rotor - 4 Bolt
Controller - 328
Plastic (Block Style)
