- Bonder & Flip Chip
- Atmospheric Plasma Cleaner
- Vacuum Plasma Cleaner
- Spin Rinse Dryer
- Dispensing & Micro/Nano Printing System
- Lithography Process Systems
- Diffusion and LPCVD Furnaces
- Rapid Thermal Processing & Annealing
- Vacuum Soldering Systems
- Parylene Coating System
- Deposition System
- Hollow Cathode Plasma Source
- Plasma Etching System
- Sintering Presses
- Wet Process & Plating Tool
- Vacuum Chamber
- Electron Beam & Photo Resist
- Deposition Materials
Panel Plating Tool µGALV-P
Panel Planting Tool
- Our newest platform to process panels larger than 300 x 300 mm² in vertical chambers.
- Horizontal configuration for high plating speed and superior uniformity on substrates.
- Customized Build-Up to cover the request for process and throughput
