Description
The biggest system in our Q-series. Perfect for multiple Wafers with sizes up to 200mm diameter
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Dimensions:
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              L: 760mm W: 775mm H: 775mm
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Weight:
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                  100 KG
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Volume:
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                  20 Liter
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Process chamber:
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          quartz glass, 240mm Ø, B: 450mm
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Microwave output:
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         2,45 GHz / 50 – 1200 Watt
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Inclusive:
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                  1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
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Substrate holder (optional):
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 aluminium, custom design possible
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Vacuum connection:
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        DN 40 ISO-KF
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Venting:
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                   electromagnetic solenoid valve
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Pump system:
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              up to 40m³/h
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Chamber door:
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             you can choose between hinged-type with viewing port and drawer door with attached support rods
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Wafer size:
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                up to 200mm, at a number of 50 wafers
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