Q 240

Dimensions:

                           L: 760mm W: 775mm H: 775mm

Weight:

                                    100 KG

Volume:

                                    20 Liter

Process chamber:

                   quartz glass, 240mm Ø, B: 450mm

Microwave output:

                  2,45 GHz / 50 – 1200 Watt

Inclusive:

                                   1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

  aluminium, custom design possible

Vacuum connection:

                DN 40 ISO-KF

Venting:

                                     electromagnetic solenoid valve

Pump system:

                           up to 40m³/h

Chamber door:

                         you can choose between hinged-type with viewing port and drawer door with attached support rods

Wafer size:

                                up to 200mm, at a number of 50 wafers