Q150 (Tabletop Unit)

The Q stands for quartz glass chambers.

Plasma equipment of series Q are mostly used in semi-conductor technology and in the area of analysis and medical technology.

Application examples: Cleaning and incineration of organic samples and varnishes in micro mechanics as well as for silicium wafers in semi-conductor industry.

Description

Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing

Dimensions:
                         L: 500mm W: 550mm H: 370mm
Weight:
                                   40 KG
Volume:
                                   4 Liter
Process chamber:
                    Quarzglas, 150mm Ø, B: 244mm
Microwave output:
                  2,45 GHz / 50 – 1200 Watt
Inclusive:
                                   1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional):
  aluminium, custom design possible
Vacuum connection:
                DN 25 ISO-KF
Venting:
                                      electromagnetic solenoid valve
Pump system:
                            up to 25m³/h
Chamber door:
                          you can choose between hinged-type with viewing port and drawer door with attached support rods
Wafer size:
                                 up to 125mm, at a number of 25 wafers