- Bonder & Flip Chip
- Atmospheric Plasma Cleaner
- Vacuum Plasma Cleaner
- Spin Rinse Dryer
- Dispensing & Micro/Nano Printing System
- Lithography Process Systems
- Diffusion and LPCVD Furnaces
- Rapid Thermal Processing & Annealing
- Vacuum Soldering Systems
- Parylene Coating System
- Deposition System
- Hollow Cathode Plasma Source
- Plasma Etching System
- Sintering Presses
- Wet Process & Plating Tool
- Vacuum Chamber
- Electron Beam & Photo Resist
- Deposition Materials
Labcoater Series 300
Labcoater for laboratory and production facilities.
Optimized for smaller companies and production teams.
Optional equipment makes this labcoater a very versatile machine with a variable process chamber volume, starting at 25l.
Built-in plasma source.
Also available as cleanroom version.
Choice of 4 different volumes.
Description
Versatile system, optimized for laboratory work with build-in plasma source for surface pre-treatment
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Dimensions:
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L: 1220mm W: 1050mm H: 1920mm
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Weight:
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110 KG
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Volume:
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25 / 35 / 40 / 80 Liter
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Process chamber:
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300mm Ø H: 300mm (25 Liter), 300mm Ø / H: 350mm (35 Liter), 450mm Ø, H: 500mm (80) Liter
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Plasma source:
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2,45GHz, 600 Watt
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Inclusive:
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1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
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Cooling system:
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4 liter (electromechanical Cool-trap)
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Vacuum connection:
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DIN 40 ISO-KF
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Venting:
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electromagnetic solenoid valve
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Pump system:
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50m³/h
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Electrical connection:
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3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
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