amr 200/300 Semi-automatic single wafer processing

Our semi-automatic equipment – the modular, highly flexible amr stand-alone spinner and our individually configurable amt tabletop hotplate – is of great benefit for R&D laboratories and institutions with small-lot production and single processing steps within the treatment of a variety of substrate specifications.

Our amcoss amr series for coating, developing, cleaning, lift-off, vapor priming, etching and heating of individual substrates is a completely modular system and perfectly adapted to the requirements of single- and small batch series production. The control unit, consisting of the control system with the ams PILOT software, may be flexibly combined according to customer needs and specific process requirements, with one or more selected processing units. Every unit holds one processing module (coater, developer, cleaner, lift-off, etcher, hot-/coolplate, vapor priming hotplate or media module). Therefore, our customers can individually compose their personal amr equipment. Depending on the wafer diameters that will have to be processed, the units will be fitted with different processing modules of varying sizes. As a consequence there are two amr types varying in size with, however, the same dimensions:

amr 200 – for wafer types 2“ to 200 mm in diameter, as well as Small Pieces
amr 300 – for wafer types 2“ to 300 mm in diameter, as well as Small Pieces

Download brochures here.