Primaxx® Monarch 3

HF Vapor Etch System for R&D and Small Batch Processing

The Primaxx^® Monarch 3 vapor hydrogen fluoride (VHF) etch system is designed to perform selective etch release via a controlled anhydrous HF/alcohol etch process. The Monarch 3 is a compact module includes a 3-wafer process chamber including a semi-automatic 3-wafer loader with load lock, and is designed for research laboratories and small volume production environments. An integrated panel PC, with on-board electronics minimizes cleanroom footprint and the system has been designed for easy wafer size changes and maintenance.