Primaxx® Monarch 25

HF Vapor Etch System for Wafers up to 200mm in High Volume Production

The Primaxx^® Monarch 25 vapor hydrogen fluoride (VHF) etch system is fully integrated and designed to perform selective etch release via a controlled anhydrous HF/alcohol etch process for medium to high volume HF release etch production applications. The Primaxx Monarch 25 is compatible with wafers from 100mm-200mm (4-8”), offering high throughput, high uptime batch processing for up to 25 wafers per batch. Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production. Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint. The Monarch 25 is available on either the Primaxx^® fxP (for up to 6 process modules) or Primaxx^® c2L (up to 4 process modules) platforms. This VHF etch module can also be combined with other SPTS etch or deposition modules on a SPTS Versalis™ platform if required.